High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
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چکیده
منابع مشابه
High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
Shuffle motors are electrostatic stepper micromotors that employ a built-in mechanical leverage to produce large output forces as well as high resolution displacements. These motors can generally move only over predefined paths that served as driving electrodes. Here, we present the design, modeling and experimental characterization of a novel shuffle motor that moves over an unpatterned, elect...
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ژورنال
عنوان ژورنال: Micromachines
سال: 2010
ISSN: 2072-666X
DOI: 10.3390/mi1020048